Large-Scale Vacuum Plasma Cleaning Machine – Manufacturer of Fully Automated Plasma Cleaning Equipment

Model: C-XSL (Large-scale)

Equipment Specifications
– Dimensions (W × H × D): 1600 × 2100 × 1750 mm
– Internal chamber volume: 200–2000 L
– Electrode and chamber materials: Magnesium-aluminum alloy / SUS304
– Electrode configuration: Horizontal / Vertical
– Plasma output power: 0–20 kW (adjustable)
– Operating frequency (during plasma generation): 40 kHz / 13.56 MHz
– Gas inlet lines: 2 inlets + 1 vent + 1 grafting line
– Gas flow rate: 0–1000 mL/min (automatically adjustable)
– Chamber temperature sensing: 0–100°C
– Cooling method: Air cooling / Water cooling
– Discharge vacuum level: 30–500 mTorr
– Process gases: Air / O₂ / N₂ / H₂ / CF₄ / Ar / Inert gases

Technical Advantages
– Large chamber capacity; capable of batch processing large workpieces
– Uniform vacuum environment ensuring high processing consistency
– Supports multi-layer racks and rotating platforms for high space utilization
– Adjustable process parameters; compatible with a wide range of materials
– Stable operation; suitable for large-scale mass production
– No chemical pollution; environmentally friendly and safe

Applications
– Pre-bonding activation for large plastic parts and automotive trim
– Surface cleaning and decontamination for large-area metal and ceramic components
– Batch plasma treatment for electronic modules and connectors
– Adhesion enhancement for industrial products prior to coating or dispensing